A virtual DOE-based process sensitivity check was performed for two tiers of channel holes in a 3D NAND device. The channel hole tilt distance, twist angle, and their sensitivities to the visible area ...
The process control and instrumentation minor emphasizes developing skills and knowledge in theory, software and in the field. Students graduate ready to solve complex control problems in the chemical ...
Residual gas analyzers (RGAs) are compact quadrupole mass spectrometers that are usually used for process control and contamination monitoring in ultrahigh vacuum (UHV) applications. There are some ...
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